This system is ideal for processing metals, ceramics, organic materials, and glass. It supports both tapered and straight holes with a depth-to-width ratio >10:1 and a minimum diameter of 5µm.



| Category | Parameter | FM-UVD3 Value |
|---|---|---|
| Laser | Wavelength / Power | 355nm / >3W@40kHz (up to 40W) |
| Laser | Pulse width / M2 | 15ns@40kHz / <1.2 |
| Galvanometer | Scan range / Accuracy | <15*15mm / ≤±3μm |
| XY Workbench | Journey | 300*300mm (600*600mm opt.) |
| XY Workbench | Resolution / Rep. | 0.1μm / ≤±1μm |
| Z-axis | Journey / Accuracy | 200mm / ≤±5μm |
| CCD Camera | Resolution / Mag. | 5 megapixels / 10X |
| Capacity | Min Spot Size | 5 μm (10 μm optional) |
| Machine Size | Dimensions / Weight | 1100*1700*1900mm / 1500kg |



Standard Warranty: 12 months after shipping.
Extended Warranty: Optional coverage up to 36 months.
Global Support: 24/7 technical assistance and service group.
Training: Free on-site or remote operation and maintenance training.
We are a technology-driven enterprise specializing in the R&D, production, and sales of industrial and scientific research laser application systems. Our solutions cover micro-hole drilling, micro-grooving, micro-welding, cutting, and marking with feature widths from 1 to 500 μm.
Our systems serve critical industries including biomedicine, semiconductors, new energy, and leading scientific research institutions worldwide.